PNG  IHDR(_{PLTE 95䜲Fig)QNc&ҼEIDATHS=O0ܤأ`S!*ĘHT@A.0!E/1MOhqr1tDGS | rDV GkCK u TbQSJ:0+ŘуC4"P`@,k]-y2hzcO ԯR8wxM͙>.C .CfbPr*ニTT@Qԡ"'z r~I2: ŊkkWN1|?RkQP:5ՍinrsHRoy*͎IENDB`